| 檢測(cè)氣體 | 熏蒸濃度量程 | 殘留泄漏量程 | 檢測(cè)原理 |
|---|---|---|---|
| 硫酰氟(SO2F2) | 0-200g/m³,0.1g/m³ | 0-100ppm,0.01ppm | 進(jìn)口高精度紅外 |
| 溴甲烷(CH3Br) | 0-200g/m³,0.1g/m³ | 0-100ppm,0.01ppm | 進(jìn)口高精度紅外 / PID光離子 |
| 磷化氫(PH3) | 0-2000ppm,1ppm | 0-100ppm,0.01ppm | 進(jìn)口高性能電化學(xué) |
| 環(huán)氧乙烷(C2H4O) | 0-1000mg/L,0.1mg/L | 0-100ppm,0.01ppm | 進(jìn)口熱導(dǎo) / 電化學(xué) |
